home-logo04.jpg
home-logo04.jpg

KASHIYAMA SDE Series Vacuum Pumps

SKU:

Add to Enquiry
Loading...

Description

SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / Products SDE90X SDE120TX SDE200 SDE303X SDE603X SDE1203TX SDE20N12TX SDE30N20 SDE60N20
Max. pumping speed
[L/min] *1		 1,300 1,500 3,300 5,000 10,000 20,000 30,000 50,000 100,000
Ultimate pressure
[Pa] *1		 1.3 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V, 380～480V
Power consumption [kW]*2 1.3 2.8 2.7 1.5 1.6 3.2 3.3 3.7
Dimensions [mm]*3 L 690 930 900 1000 1000 1080
W 370 400 400 450 450 515
H 501 500 905 1000 950 950

*1) Without N2 purge. *2) Approx. value at ultimate pressure. *3) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice. * Contact us about applicable gas.

S-P Curve

S-P Curve
* S-P curves vary by combination.

Option

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).

Related Products

home-logo06.jpg
Yamoto Scientific – Ovens and Furnaces
ENTG_BIG
ENTEGRIS ACM – Test Contactor Clean (TCC®)
home-logo04.jpg
KASHIYAMA MU-X/P Series Vacuum Pumps
home-logo04.jpg
KASHIYAMA NeoDry Series Vacuum Pumps
ferrotec-logo-png-transparent
FERROTEC Chiller System
ferrotec-logo-png-transparent
FERROTEC Electron Beam Systems and Accessories
Coltraco-Logo
COLTRACO Ultrasonic Leak Detectors for Room Integrity Testing
home-logo06.jpg
Yamoto Scientific – Laboratory Equipment
Metal Bellows and Quartz Products
PVA TEPLA Gas Plasma Processing System
PCT Megasonic Cleaners
SITEK Re-furbished Spin Rinse Dryers / New Rotors...

Product Categories

home-logo04.jpg
home-logo04.jpg

KASHIYAMA SDE Series Vacuum Pumps

SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / Products SDE90X SDE120TX SDE200 SDE303X SDE603X SDE1203TX SDE20N12TX SDE30N20 SDE60N20
Max. pumping speed
[L/min] *1		 1,300 1,500 3,300 5,000 10,000 20,000 30,000 50,000 100,000
Ultimate pressure
[Pa] *1		 1.3 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V, 380～480V
Power consumption [kW]*2 1.3 2.8 2.7 1.5 1.6 3.2 3.3 3.7
Dimensions [mm]*3 L 690 930 900 1000 1000 1080
W 370 400 400 450 450 515
H 501 500 905 1000 950 950

*1) Without N2 purge. *2) Approx. value at ultimate pressure. *3) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice. * Contact us about applicable gas.

S-P Curve

S-P Curve
* S-P curves vary by combination.

Option

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).
home-logo04.jpg
Add to Enquiry