KASHIYAMA MU-X/P Series Vacuum Pumps

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Description

MU-X Series

Power Consumption 0.35kW. Extreamly Small Footprint. Roots dry pump achieved smallest energy consumption & footprint in the category. Applicable 02 for various tools. Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / Products MU100X MU180X MU300X MU600X MU1218X MU20N18X
Max. pumping speed
[L/min] *1
1,660 3,000 5,000 10,000 20,000 30,000
Ultimate pressure
[Pa] *1
1.5 0.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *2
Power consumption
[kW] *3
0.35 0.5 0.55 0.6 0.9 1.0
Dimensions [mm] L×W×H *4 450×230×275 550×280×299 450×230×520 530×230×520 870×380×751 1000×450×950
Mass [kg] 60 95 100 120 270 410

*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve

 

MU-P/H Series

 

High Temp., More Purge. Process Durability. Smallest Power Consumption for Process by roots. Power Consumption 0.7kW. Roots dry pump good in process durability and low power consumption. Applicable to wide range of process from light to medium duty. Hot N2 purge available to enhance process durability. [MU-H Series]

Major Products

Spec. / Products MU100P/H MU180P/H MU300P/H MU600P/H MU1218P/H MU20N18P/H MU30N18P/H
Max. pumping speed
[L/min] *2
1,660 3,000 5,000 10,000 20,000 30,000 50,000
Ultimate pressure
[Pa] *2
3.0 5.0 0.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *3
Power consumption
[kW] *4
0.7 1.0 0.9 0.95 1.4 1.5 1.6
Dimensions [mm] L×W×H *5 630×350×360 715×360×408 630×350×520 870×380×751 1000×450×950
Mass [kg] 70 130 110 130 280 410 410

*1) Contact us about application beforehand. *2) Without N2 purge. *3) Contact us for other voltage options.
*4) Approx. value at ultimate pressure, +0.2kW with Hot N2 purge. *5) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve

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KASHIYAMA MU-X/P Series Vacuum Pumps

MU-X Series

Power Consumption 0.35kW. Extreamly Small Footprint. Roots dry pump achieved smallest energy consumption & footprint in the category. Applicable 02 for various tools. Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / Products MU100X MU180X MU300X MU600X MU1218X MU20N18X
Max. pumping speed
[L/min] *1
1,660 3,000 5,000 10,000 20,000 30,000
Ultimate pressure
[Pa] *1
1.5 0.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *2
Power consumption
[kW] *3
0.35 0.5 0.55 0.6 0.9 1.0
Dimensions [mm] L×W×H *4 450×230×275 550×280×299 450×230×520 530×230×520 870×380×751 1000×450×950
Mass [kg] 60 95 100 120 270 410

*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve

 

MU-P/H Series

 

High Temp., More Purge. Process Durability. Smallest Power Consumption for Process by roots. Power Consumption 0.7kW. Roots dry pump good in process durability and low power consumption. Applicable to wide range of process from light to medium duty. Hot N2 purge available to enhance process durability. [MU-H Series]

Major Products

Spec. / Products MU100P/H MU180P/H MU300P/H MU600P/H MU1218P/H MU20N18P/H MU30N18P/H
Max. pumping speed
[L/min] *2
1,660 3,000 5,000 10,000 20,000 30,000 50,000
Ultimate pressure
[Pa] *2
3.0 5.0 0.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *3
Power consumption
[kW] *4
0.7 1.0 0.9 0.95 1.4 1.5 1.6
Dimensions [mm] L×W×H *5 630×350×360 715×360×408 630×350×520 870×380×751 1000×450×950
Mass [kg] 70 130 110 130 280 410 410

*1) Contact us about application beforehand. *2) Without N2 purge. *3) Contact us for other voltage options.
*4) Approx. value at ultimate pressure, +0.2kW with Hot N2 purge. *5) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve

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