Description
Kashiyama Dry Vacuum Pumps in Singapore
This confidence is the result of the vacuum technology that has been developed over the years.
Most of the new fabs in Japan has a higher percentage of Kashiyama pumps installed and it has become the standard pump in semiconductor and LCD manufacturing.
Among the best in vacuum technology and its proven reliability has been highly praised by many customers and is suitable for the Industry’s harsh manufacturing processes.
SDE Series For Harsh Process, Energy Saver, and Large Capacity
| Model | Max pumping speed (L/min) | Ultimate pressure (Pa) |
|---|---|---|
| SDE90X | 1,300 | 1.3 |
| SDE120TX | 1,500 | 1.3 |
| SDE200 | 3,300 | 1.3 |
| SDE303X | 5,000 | 0.5 |
| SDE603X | 10,000 | 0.5 |
| SDE1203TX | 20,000 | 0.5 |
| SDE20N12TX | 30,000 | 0.5 |
| SDE30N20 | 50,000 | 0.5 |
| SDE60N20 | 100,000 | 0.5 |
SDL Series Available to large size wafer & FPD
| Model | Max pumping speed (L/min) | Ultimate pressure (Pa) |
|---|---|---|
| SDL12E50 | 25,000 | 0.8 |
| SDL20E50 | 40,000 | 0.8 |
| SDL36E60 | 60,000 | 0.8 |
| SDL3600 | 60,000 | 0.8 |
MU-X Series Power Consumption 0.35kW, Extreamly Small Footprint
| Model | Max pumping speed (L/min) | Ultimate pressure (Pa) |
|---|---|---|
| MU100X | 1,660 | 1.5 |
| MU180X | 3,000 | 1.5 |
| MU300X | 5,000 | 0.5 |
| MU600X | 10,000 | 0.5 |
| MU1218X | 20,000 | 0.5 |
| MU20N18X | 30,000 | 0.5 |
MU-P/H Series Process Durability, Power Consumption 0.7kW
| Model | Max pumping speed (L/min) | Ultimate pressure (Pa) |
|---|---|---|
| MU100P/H | 1,660 | 3.0 |
| MU180P/H | 3,000 | 5.0 |
| MU300P/H | 5,000 | 0.5 |
| MU600P/H | 10,000 | 0.5 |
| MU1218P/H | 20,000 | 0.5 |
| MU20N18P/H | 30,000 | 0.5 |
| MU30N18P/H | 50,000 | 0.5 |
NeoDry Series Handy & Air Cooled Dry Pump
| Model | Max pumping speed (L/min) | Ultimate pressure (Pa) |
|---|---|---|
| NeoDry7E | 110 | 5.0 |
| NeoDry15E | 250 | 1.0 |
| NeoDry30E | 500 | 1.0 |
| NeoDry36E | 600 | 1.0 |
| NeoDry60E | 1,000 | 1.0 |
| NeoDry100E | 1,670 | 2.0 |
| NeoDry300E | 5,000 | 0.3 |
